Creating On-Chip MEMS Sensors in CMOS
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Creating On-Chip MEMS Sensors in CMOS
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About this listen
Nanusens creates nanoscale sensor structures inside the CMOS layers using standard CMOS processes within the same production flow as making the control electronics on the same chip. This approach reduces the size and cost as it benefits from the vast economies of scale of using giant CMOS fabs. The resulting single chip solution has a packaged size of 0.5 mm³. This episode delves into the technology, its future, and some limitations.
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